圆柱腔内微波等离子体激励的研究

华东师范大学学报(自然科学版) ›› 2005, Vol. 2005 ›› Issue (2): 52-57.

圆柱腔内微波等离子体激励的研究

廖斌，张莲，安同一，朱守正

华东师范大学微波研究所，上海200062

收稿日期:2003-11-24 修回日期:2004-03-24 出版日期:2005-05-25 发布日期:2005-05-25
通讯作者: 廖斌

Study on Microwave Plasma Excitation in a Cylindrical Cavity(Chinese)

LIAO Bin，ZHANG Lian,AN Tong-yi,ZHU Shou-zheng

Institute of Microwave，East China Normal University，Shanghai 200062，China

Received:2003-11-24 Revised:2004-03-24 Online:2005-05-25 Published:2005-05-25
Contact: LIAO Bin

摘要/Abstract

摘要： 根据谐振腔理论，证明圆柱反应腔内的主模为TM_01p模，并在圆柱坐标下采用FD-TD数值方法求解圆柱形反应腔中的场分布情况，改善和提高微波等离子体反应装置的激励性能.等离子体实际分布与场分布的预测结果基本吻合.

关键词: 微波等离子体, 圆柱腔, TM_01p模, FD-TD数值方法, 微波等离子体, 圆柱腔, TM_01p模, FD-TD数值方法

Abstract: According to resonant theory, it was justified that TM01p was the main mode in a cylindrical cavity . Finite difference time domain（FD-TD）in cylindrical coordinate system was used to simulate the electromagnetic field distributions inside the reactor to improve performances. The experimental results are in good agreement with the theoretical predictions.

Key words: cylindrical cavity, TM_01p mode, FD-TD numerical method, microwave plasma, cylindrical cavity, TM_01p mode, FD-TD numerical method

中图分类号:

TN99

廖斌;张莲;安同一;朱守正. 圆柱腔内微波等离子体激励的研究[J]. 华东师范大学学报(自然科学版), 2005, 2005(2): 52-57.

LIAO Bin;ZHANG Lian;AN Tong-yi;ZHU Shou-zheng. Study on Microwave Plasma Excitation in a Cylindrical Cavity(Chinese)[J]. Journal of East China Normal University(Natural Sc, 2005, 2005(2): 52-57.