华东师范大学学报(自然科学版) ›› 2007, Vol. 2007 ›› Issue (5): 118-122.

• 物理学 电子学 • 上一篇    下一篇

新型RF MEMS开关的动态表征

张永华1，刘蕾1，丁桂甫2，蔡炳初2，赖宗声1
  

  1. 1．华东师范大学 微电子电路与系统研究所，上海 200062；2．上海交通大学 微纳科学技术研究院，上海 200030
  • 收稿日期:2006-12-28 修回日期:2007-04-13 出版日期:2007-09-25 发布日期:2007-09-25
  • 通讯作者: 张永华

Dynamic Characterization of an Innovative RF MEMS Switch(Chinese)

ZHANG Yong-hua1, LIU Lei1, DING Gui-fu2, CAI Bing-chu2, LAI Zong-sheng1
  

  1. 1. Institute of Microelectronics Circuit and System, East China Normal University, Shanghai 200062, China; 2.Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China
  • Received:2006-12-28 Revised:2007-04-13 Online:2007-09-25 Published:2007-09-25
  • Contact: ZHANG Yong-hua

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摘要： 一种基于UVLIGA加工技术的双稳态电磁型RF MEMS开关，由于其结构使用了永磁体单元而使得开关在维持“开”或“关”态时不需要功耗，从而实现低功耗的电磁驱动.利用非接触式Wyko NT1 100光学轮廓仪所附带的动态测量系统（DMEMS），对开关的动态响应进行了测量.测量结果表明开关实现了双稳态驱动，开关实现状态完全切换到位对应的响应时间不到20 μs.

关键词: 微电子机械系统, 射频开关, 双稳态, 动态测量 , 微电子机械系统, 射频开关, 双稳态, 动态测量

Abstract: Due to the use of permanent magnet in structure,a bistable electromagnetic radio frequency microelectromechanical systems (RF MEMS) switch based on UVLIGA technology requires no energy to remain at “on” or “off” state. And the electromagnetic actuation with low power consumption can be achieved.The dynamic characterization of the switch was successfully measured using DMEMS dynamic measurement system attached to wyko NT1 100 optical profiling system supplied by Veeco instruments Co.,Ltd.The results of test showed that the bistable electromagnetic actuation is achieved, and the switching time is less than 20 μs.

Key words: radio frequency switch, bistable, dynamic measurement, microelectro mechanical systems, radio frequency switch, bistable, dynamic measurement

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