相位连续可调毫米波MEMS移相器的研制

华东师范大学学报(自然科学版) ›› 2004, Vol. 2004 ›› Issue (1): 49-55.

相位连续可调毫米波MEMS移相器的研制

郭方敏^1,3, 朱守正¹, 魏华征¹, 郑莹¹, 朱荣锦¹, 忻佩胜¹, 朱自强¹, 赖宗声¹, 杨根庆², 陆卫³

1.华东师范大学信息科学技术学院，上海 200062; 2.中国科学院上海微系统与信息技术研究所，传感技术联合开放实验室，上海 200050; 3.中国科学院上海技术物理所，红外物理国家重点实验室，上海 200083

收稿日期:2002-11-09 修回日期:2003-01-13 出版日期:2004-03-25 发布日期:2004-03-25
通讯作者: 郭方敏

The Study of MEMS Millimeter Wave Phase Shifter

GUO Fang-min^1,3, ZHU Shou-zheng¹, WEI Hua-zheng¹, ZHENG Ying¹, ZHU Rong-jing¹, XIN Pei-sheng¹, ZHU Zi-qiang¹, LAI Zong-sheng¹, YANG Gen-qing ², LU Wei³

1. Department of Electrical Engineering, East China Normal University, Shanghai 200062,China 2. State key Lab. of Transducer Technology Shanghai Institute of Metallurgy，Chinese Academy of Sciences Shanghai 200050,China 3. State Key Lab. of Transducer Tech，Shanghai Institute of Metallurgy，Chinese Academy of Science, Shanghai 200083, China

Received:2002-11-09 Revised:2003-01-13 Online:2004-03-25 Published:2004-03-25
Contact: GUO Fang-min

摘要/Abstract

摘要： MEMS毫米波相移器是MEMS毫米波相控阵天线的关键部件之一，它的性能直接决定了毫米波相控阵天线的性能。该文介绍毫米波MEMS相移器的设计，研究低损耗衬底，Au,Al_xSi_1-x可动膜对下拉电压和传输损耗的影响，测试表明:21桥相位连续可调的分布式压控开关阵列一毫米波相移器在35GHz时，启动电压5V,20V时相移量达到372^o/3. 5 mm，并能在不同的控制电压下根据要求改变相移量。

关键词: MEMS, 毫米波相移器, 相位连续可调, 传输损耗, 插人损耗, 启动电压, MEMS, 毫米波相移器, 相位连续可调, 传输损耗, 插人损耗, 启动电压

Abstract: Several designs of MEMS millimeter-wave phase shifters are presented in this paper. They consist of a coplanar wave-guide (CPW) transmission line periodically loaded with 8-32 metal bridges, functioning as capacitive switches. Every switching element consists of a thin metallic membrane actuated by applied bias. Remarkable phase shifter performances were observed. 21Al_0.96Si_0.04 bridges MEMS Phase shifter reached to 372(/3. 5mm under 20V bias at 35 GHz, the with an insertion lose (S₂₁) of about 4-7 dB.

Key words: millimeter-wave phase shit, phase continuous adjusted, transmission loss, insertion loss, actuation voltage, MEMS, millimeter-wave phase shit, phase continuous adjusted, transmission loss, insertion loss, actuation voltage

中图分类号:

TN405

郭方敏;朱守正;魏华征;郑莹;朱荣锦;忻佩胜;朱自强;赖宗声;杨根庆;陆卫. 相位连续可调毫米波MEMS移相器的研制[J]. 华东师范大学学报(自然科学版), 2004, 2004(1): 49-55.

GUO Fang-min;ZHU Shou-zheng;WEI Hua-zheng;ZHENG Ying;ZHU Rong-jing;XIN Pei-sheng;ZHU Zi-qiang;LAI Zong-sheng;YANG Gen-qing;LU Wei. The Study of MEMS Millimeter Wave Phase Shifter[J]. Journal of East China Normal University(Natural Sc, 2004, 2004(1): 49-55.