用于高空气象探测的聚酰亚胺薄膜湿敏电容研究

华东师范大学学报(自然科学版) ›› 2014, Vol. 2014 ›› Issue (4): 69-76.

用于高空气象探测的聚酰亚胺薄膜湿敏电容研究

卞晓月¹, 张健¹, 王剑平², 吉淳², 吴一奇²

1. 华东师范大学~~信息科学技术学院, 上海 200241; 2. 上海长望气象科技有限公司, 上海201209

收稿日期:2013-09-01 修回日期:2013-12-01 出版日期:2014-07-25 发布日期:2014-07-25

Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation

BIAN Xiao-yue¹, ZHANG Jian¹, WANG Jian-ping², JI Chun², WU Yi-qi²

1. School of Information Science Technology, East China Normal University, Shanghai 200241, China; 2. Changwang Meteorological Science and Technology Co., Ltd., Shanghai 201209, China

Received:2013-09-01 Revised:2013-12-01 Online:2014-07-25 Published:2014-07-25

摘要/Abstract

摘要： 设计制作了一种基于MEMS技术,
可应用于高空湿度探测的薄膜湿敏电容. 电容采用三明治结构,
聚酰亚胺薄膜作为湿度敏感层材料, 金作为上、下电极. 测试结果表明,
在15{\%}RH$\sim $95{\%}RH的全量程范围内, 湿敏电容的合格率$\geqslant
$80{\%}, 灵敏度约为0.29pF/{\%}RH, 线性误差$<$1.5{\%}RH, 湿滞较小,
响应时间小于4~s, 温度系数好, 具有良好的长期稳定性. 研究表明,
制作的湿敏电容综合指标良好, 适合批量生产, 可以满足高空气象探测要求.

关键词: 湿度传感器, 湿敏电容, 聚酰亚胺, MEMS

Abstract: Based on MEMS technology, a design of humidity sensitive
capacitor was described. The capacitor employed sandwich structure,
i.e. polyimide was used as the humidity sensitive material and gold
was used as the electrodes. Capacitor shows a good pass rate of
80{\%}. As can be seen from the measurements, over the testing range
from 15{\%} RH to 95{\%} RH, the maximum linearity error is 1.5{\%}
RH. The sensitivity reaches 0.29pF /{\%} RH. The hysteresis is
small, and the sensor has fast response time of 4~s. Meanwhile,
capacitor shows good temperature coefficient and long-term
stability. The results show that the comprehensive indexes of
humidity capacitor are satisfactory. The capacitor is suitable for
batch fabrication and can be used for high altitude meteorological
observation.

Key words: humidity sensor, humidity sensitive capacitor, polyimide, MEMS

中图分类号:

TP212

卞晓月, 张健, 王剑平, 吉淳, 吴一奇. 用于高空气象探测的聚酰亚胺薄膜湿敏电容研究[J]. 华东师范大学学报(自然科学版), 2014, 2014(4): 69-76.

BIAN Xiao-yue, ZHANG Jian, WANG Jian-ping, JI Chun, WU Yi-qi. Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation[J]. Journal of East China Normal University(Natural Sc, 2014, 2014(4): 69-76.

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