曹春岳：运用介电泳技术将SnO2纳米球体作为敏感元件的相对湿度传感器特性

华东师范大学学报(自然科学版) ›› 2012, Vol. 2012 ›› Issue (5): 16-23,36.

曹春岳：运用介电泳技术将SnO₂纳米球体作为敏感元件的相对湿度传感器特性

曹春岳

华东师范大学~~电子工程系, 上海 200241

收稿日期:2011-11-01 修回日期:2012-02-01 出版日期:2012-09-25 发布日期:2012-09-29

Characterization of a humidity sensor fabricated with SnO₂ nano-spheres via dielectrophoresis

CAO Chun-yue

Department of Electronic Engineering, East China Normal University, Shanghai 200041, China

Received:2011-11-01 Revised:2012-02-01 Online:2012-09-25 Published:2012-09-29

摘要/Abstract

摘要： 通过介电泳技术将敏感元件SnO₂球形纳米颗粒定位到间距为20μm的Au叉指电极之间, 制备了一种相对湿度传感器. 从获得的I-V曲线可以看出, Au/SnO₂/SnO₂/Au组合结构具有良好的电导率. 通过自己设计的相对湿度测试系统测试了其传感特性, 结果显示该湿度传感器具有高的敏感性及可重复性. 证明了运用介电泳方法所制备的湿度传感器在各种不同的湿度条件下, 都具有很好的稳定性, 即使是在非常高的湿度条件下. 并且这种方法可以广泛用于其它种类的纳米球和各种不同器件结构中.

关键词: 介电泳, 纳米球体, 二氧化锡, 微电极, 湿度传感器

Abstract: A relative humidity sensor was fabricated by dielectrophoresis (DEP) to connect with the sphere-shaped SnO₂ nano-particles as sensing elements based on the Au micro-electrodes with the gap of 20 μm. the I-V curve obtained verified good electric conductivity of the Au/SnO₂/SnO₂/Au structure fabricated. The sensing properties were tested in a self-designed relative humidity measuring system. The high sensitivity and good repeatability were obtained. It was proved the sensing structure fabricated in the solution using DEP has good stability under varied humidity levels, even under a high humidity level. The proposed methodology can be easily applied to other nano-spheres and construction of other devices.

Key words: dielectrophoresis, nano-sphere, tin oxide, micro-electrode, humidity sensor

中图分类号:

TB383
TP212

曹春岳. 曹春岳：运用介电泳技术将SnO₂纳米球体作为敏感元件的相对湿度传感器特性[J]. 华东师范大学学报(自然科学版), 2012, 2012(5): 16-23,36.

CAO Chun-yue. Characterization of a humidity sensor fabricated with SnO₂ nano-spheres via dielectrophoresis[J]. Journal of East China Normal University(Natural Sc, 2012, 2012(5): 16-23,36.

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曹春岳：运用介电泳技术将SnO₂纳米球体作为敏感元件的相对湿度传感器特性

Characterization of a humidity sensor fabricated with SnO₂ nano-spheres via dielectrophoresis

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