Journal of East China Normal University(Natural Sc ›› 2012, Vol. 2012 ›› Issue (5): 16-23,36.

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Characterization of a humidity sensor fabricated with SnO2 nano-spheres via dielectrophoresis

CAO Chun-yue   

  1. Department of Electronic Engineering, East China Normal University, Shanghai 200041, China
  • Received:2011-11-01 Revised:2012-02-01 Online:2012-09-25 Published:2012-09-29

Abstract: A relative humidity sensor was fabricated by dielectrophoresis (DEP) to connect with the sphere-shaped SnO2 nano-particles as sensing elements based on the Au micro-electrodes with the gap of 20 μm. the I-V curve obtained verified good electric conductivity of the Au/SnO2/SnO2/Au structure fabricated. The sensing properties were tested in a self-designed relative humidity measuring system. The high sensitivity and good repeatability were obtained. It was proved the sensing structure fabricated in the solution using DEP has good stability under varied humidity levels, even under a high humidity level. The proposed methodology can be easily applied to other nano-spheres and construction of other devices.

Key words: dielectrophoresis, nano-sphere, tin oxide, micro-electrode, humidity sensor

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