Journal of East China Normal University(Natural Sc ›› 2007, Vol. 2007 ›› Issue (5): 118-122.

• Article • Previous Articles     Next Articles

Dynamic Characterization of an Innovative RF MEMS Switch(Chinese)

ZHANG Yong-hua1, LIU Lei1, DING Gui-fu2, CAI Bing-chu2, LAI Zong-sheng1

  1. 1. Institute of Microelectronics Circuit and System, East China Normal University, Shanghai 200062, China; 2.Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China
  • Received:2006-12-28 Revised:2007-04-13 Online:2007-09-25 Published:2007-09-25
  • Contact: ZHANG Yong-hua

Abstract: Due to the use of permanent magnet in structure,a bistable electromagnetic radio frequency microelectromechanical systems (RF MEMS) switch based on UVLIGA technology requires no energy to remain at “on” or “off” state. And the electromagnetic actuation with low power consumption can be achieved.The dynamic characterization of the switch was successfully measured using DMEMS dynamic measurement system attached to wyko NT1 100 optical profiling system supplied by Veeco instruments Co.,Ltd.The results of test showed that the bistable electromagnetic actuation is achieved, and the switching time is less than 20 μs.

Key words: radio frequency switch, bistable, dynamic measurement, microelectro mechanical systems, radio frequency switch, bistable, dynamic measurement

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