Journal of East China Normal University(Natural Sc ›› 2005, Vol. 2005 ›› Issue (2): 52-57.

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Study on Microwave Plasma Excitation in a Cylindrical Cavity(Chinese)

LIAO Bin，ZHANG Lian,AN Tong-yi,ZHU Shou-zheng   

  1. Institute of Microwave，East China Normal University，Shanghai 200062，China
  • Received:2003-11-24 Revised:2004-03-24 Online:2005-05-25 Published:2005-05-25
  • Contact: LIAO Bin

Abstract: According to resonant theory, it was justified that TM01p was the main mode in a cylindrical cavity . Finite difference time domain（FD-TD）in cylindrical coordinate system was used to simulate the electromagnetic field distributions inside the reactor to improve performances. The experimental results are in good agreement with the theoretical predictions.

Key words: cylindrical cavity, TM01p mode, FD-TD numerical method, microwave plasma, cylindrical cavity, TM01p mode, FD-TD numerical method

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